Difference between revisions of "Photolitho20240319 - MP"

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(Created page with "25 um using GM1070 Fixed the hotplate setting: will not start immediately after power on Used VWR (ramp6) for 3rd wafer, works well Used 2nd glass beaker for IPA washing after...")
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Revision as of 17:40, 20 March 2024

25 um using GM1070 Fixed the hotplate setting: will not start immediately after power on Used VWR (ramp6) for 3rd wafer, works well Used 2nd glass beaker for IPA washing after development, wafer is clean and homogenous