Difference between revisions of "20210309"
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* Noticeable bulge at edge of wafer. Tried to wait for an hour, but it did not change much. | * Noticeable bulge at edge of wafer. Tried to wait for an hour, but it did not change much. | ||
* Transferred to hot plate: 65C 15min, 95C 90 min, should be 120, but display only has 2 digits. time manually. | * Transferred to hot plate: 65C 15min, 95C 90 min, should be 120, but display only has 2 digits. time manually. | ||
+ | * We need a timer here! I am not really sure how much time it stayed at 95C, when I took it out the temp had dropped to 77C | ||
+ | * Transferred to UV KUB, put mask on top and insolated for 22s | ||
+ | * Transferred to hot plate after about 10 min when hot plate was at 60C. | ||
+ | * Is there something wrong with how I put the mask on? The big structures are nice and square, but the small structures did not even make a indent in the surface. | ||
+ | * => check which side up of mask | ||
+ | * => try new SU8 | ||
+ | * => take images with WLI |
Latest revision as of 09:48, 10 March 2021
Continued from yesterday
- Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min.
- Table says 5 min develop.
- I used new PGMEA
- After 3 minutes I noticed white structures in the region around the main structures. I did not understand what this signified
- After 5 min I rinsed with isopropanol (IP)
- I struggled to get good view in the microscope. Therefore I miscalculated what I saw and thought I needed to develop more.
- I developed about 30 s more.
- In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased.
Time to start again
New try
- Use new wafer and go straight for plasma cleaning
- Skip heating and do spinning
I lost all my edits! Obviously it's important to save before leaving idle
- SU8 to wafer using syringe worked perfectly.
- Used a single spin: ramp 100, 900 rpm at 40s
- Display said it only spun at 830 RPM
- Noticeable bulge at edge of wafer. Tried to wait for an hour, but it did not change much.
- Transferred to hot plate: 65C 15min, 95C 90 min, should be 120, but display only has 2 digits. time manually.
- We need a timer here! I am not really sure how much time it stayed at 95C, when I took it out the temp had dropped to 77C
- Transferred to UV KUB, put mask on top and insolated for 22s
- Transferred to hot plate after about 10 min when hot plate was at 60C.
- Is there something wrong with how I put the mask on? The big structures are nice and square, but the small structures did not even make a indent in the surface.
- => check which side up of mask
- => try new SU8
- => take images with WLI