Difference between revisions of "Photolitho20231220"
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GM 1070 for thickness 25 um | GM 1070 for thickness 25 um | ||
+ | |||
+ | Film masks: MP04-Lines with width 10/20/40 um, MP05-L-shape and Umbrella | ||
+ | |||
+ | Results: MP04-fine, 40 um line looks ok, 20 um line is narrower than mask, 10 um line is not successful. | ||
+ | |||
+ | MP05-bad, accidentally developed twice. | ||
+ | |||
+ | '''Notes from using hotplate:''' | ||
+ | |||
+ | 1-Set Program 1 to 22°C is useless, during '''Pre-bake''', after switching on, the temperature goes to 65°C very rapidly. It seems to skip Program 1 and go straight to Program S1 | ||
+ | |||
+ | 2-Alternative and useful: during '''Post-bake''', I set '''Program S1 to be 5 sec@48°C,''' with '''ramp speed =2,''' (Program S2 to be 65°C, Program S2 to be 95°C), temperature rises slowly. | ||
+ | |||
+ | 3-I also set Program S4 to be 18°C, with ramp speed = 6, but it cools down too slowly anyway. The best is to turn off the machine and take out wafers. | ||
+ | |||
+ | Steps: | ||
+ | |||
+ | Day 0, | ||
+ | |||
+ | Take out the GM 1070 aliquot from the fridge (NA) | ||
+ | |||
+ | Day 1, | ||
+ | |||
+ | Clean 2 wafers with isopropanol + plasma (2 mins) | ||
+ | |||
+ | Spin coat speed: 3100 rpm, 40 sec | ||
+ | |||
+ | Relax time: 1 hour. | ||
+ | |||
+ | '''Pre-bake: 15 min@65°C, 35 min @95°C.''' | ||
+ | |||
+ | Exposure dose: 155~310 mJ/cm2 (divide the number from the datasheet, 620, by factor 2 to 4) | ||
+ | |||
+ | Exposure time: 20% power, 25s | ||
+ | |||
+ | Delay after UV exposure: 10 min. | ||
+ | |||
+ | '''Pre-bake: (5 sec@48°C), 15 min@65°C, 40 min @95°C.''' | ||
+ | |||
+ | Develop in PGMEA: 3 min | ||
+ | |||
+ | Hard Bake using VWR hot plate 2 hours@135°C | ||
+ | |||
+ | Interferometer |
Revision as of 15:56, 21 December 2023
GM 1070 for thickness 25 um
Film masks: MP04-Lines with width 10/20/40 um, MP05-L-shape and Umbrella
Results: MP04-fine, 40 um line looks ok, 20 um line is narrower than mask, 10 um line is not successful.
MP05-bad, accidentally developed twice.
Notes from using hotplate:
1-Set Program 1 to 22°C is useless, during Pre-bake, after switching on, the temperature goes to 65°C very rapidly. It seems to skip Program 1 and go straight to Program S1
2-Alternative and useful: during Post-bake, I set Program S1 to be 5 sec@48°C, with ramp speed =2, (Program S2 to be 65°C, Program S2 to be 95°C), temperature rises slowly.
3-I also set Program S4 to be 18°C, with ramp speed = 6, but it cools down too slowly anyway. The best is to turn off the machine and take out wafers.
Steps:
Day 0,
Take out the GM 1070 aliquot from the fridge (NA)
Day 1,
Clean 2 wafers with isopropanol + plasma (2 mins)
Spin coat speed: 3100 rpm, 40 sec
Relax time: 1 hour.
Pre-bake: 15 min@65°C, 35 min @95°C.
Exposure dose: 155~310 mJ/cm2 (divide the number from the datasheet, 620, by factor 2 to 4)
Exposure time: 20% power, 25s
Delay after UV exposure: 10 min.
Pre-bake: (5 sec@48°C), 15 min@65°C, 40 min @95°C.
Develop in PGMEA: 3 min
Hard Bake using VWR hot plate 2 hours@135°C
Interferometer