Difference between revisions of "Spin coater programming"

Revision as of 15:00, 10 November 2023

Buttons: D, E, C

D = Enter, E= Edit, C = Confirm/Finish/Exit

Parameters:

Start Delay: 3S

Dwell = Spinning Time

Ramp= Acceleration Time

Speed: rpm/s - For example, 400 rpm/s, 1700 rpm/s

1. Power on, Manual

Two Step Settings:

Step 1:

Program press D to set -> D -> [Program Menu?] -> D-> [Edit start/stop?]-> D-> [Edit Step 1]-> E-> [Edit step 1 Speed: 400]-> D->

[Edit step 1 Dwell: 20]-> D-> [Edit step 1 Ramp: 100]-> D -> [Edit step 1 o/ps:] -> C-> Program press D to set

Step 2:

Program press D to set -> D-> [Edit step 1] -> D-> [Edit step 2] -> E -> [Speed: 1700] -> D-> [Edit step 2 Dwell: 40]-> D->

[Edit step 2 Ramp: 100]-> D-> [Edit step 2 o/ps:] -> C-> Program press D to set

Attention: Step 3 [No settings] – Test whether has part 3

Note: step 1: Setting speed: 400 - the actual display speed: 330; setting speed: 440, actual speed: 370; Step 2: after input speed number, ex: 3100, then click E to confirm. Display speed: 037 = 370, speed: 314 = 3140

Turn on the vacuum pump to hold the wafer on the spinner, includes the valve below the bench.

Volume： Add more volume than the minimum required. Not necessarily to be accurate.

Blue button to start the spin coating.