Difference between revisions of "Spin coater programming"

Latest revision as of 15:02, 10 November 2023

Buttons: D, E, C

D = Enter, E= Edit, C = Confirm/Finish/Exit

Parameters:

Start Delay: 3S

Dwell = Spinning Time

Ramp= Acceleration Time

Speed: rpm/s - For example, 400 rpm/s, 1700 rpm/s

1. Power on, Manual

Two Step Settings:

Step 1:

Program press D to set -> D -> [Program Menu?] -> D-> [Edit start/stop?]-> D-> [Edit Step 1]-> E-> [Edit step 1 Speed: 400]-> D->

[Edit step 1 Dwell: 20]-> D-> [Edit step 1 Ramp: 100]-> D -> [Edit step 1 o/ps:] -> C-> Program press D to set

Step 2:

Program press D to set -> D-> [Edit step 1] -> D-> [Edit step 2] -> E -> [Speed: 1700] -> D-> [Edit step 2 Dwell: 40]-> D->

[Edit step 2 Ramp: 100]-> D-> [Edit step 2 o/ps:] -> C-> Program press D to set

Attention: Step 3 [No settings] – Test whether has part 3

Note: step 1: Setting speed: 400 - the actual display speed: 330; setting speed: 440, actual speed: 370; Step 2: after input speed number, ex: 3100, then click E to confirm. Display speed: 037 = 370, speed: 314 = 3140

Turn on the vacuum pump to hold the wafer on the spinner, includes the valve below the bench.

Blue button to start the spin coating.