Difference between revisions of "20210309"
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+ | ==== Continued from yesterday ==== | ||
* Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min. | * Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min. | ||
* Table says 5 min develop. | * Table says 5 min develop. | ||
* I used new PGMEA | * I used new PGMEA | ||
− | * After 3 minutes I noticed white structures in the | + | * After 3 minutes I noticed white structures in the region around the main structures. I did not understand what this signified |
+ | * After 5 min I rinsed with isopropanol (IP) | ||
+ | * I struggled to get good view in the microscope. Therefore I miscalculated what I saw and thought I needed to develop more. | ||
+ | * I developed about 30 s more. | ||
+ | * In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased. | ||
+ | [[File:Wafer20210309.jpg|left|thumb|300x300px|This wafer was overdeveloped]] | ||
+ | Time to start again | ||
+ | |||
+ | ==== New try ==== | ||
+ | * Use new wafer and go straight for plasma cleaning | ||
+ | * Skip heating and do spinning |
Revision as of 11:13, 9 March 2021
Continued from yesterday
- Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min.
- Table says 5 min develop.
- I used new PGMEA
- After 3 minutes I noticed white structures in the region around the main structures. I did not understand what this signified
- After 5 min I rinsed with isopropanol (IP)
- I struggled to get good view in the microscope. Therefore I miscalculated what I saw and thought I needed to develop more.
- I developed about 30 s more.
- In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased.
Time to start again
New try
- Use new wafer and go straight for plasma cleaning
- Skip heating and do spinning