Difference between revisions of "20210309"
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==== Continued from yesterday ==== | ==== Continued from yesterday ==== | ||
| + | [[File:Wafer20210309.jpg|left|thumb|300x300px|This wafer was overdeveloped]] | ||
* Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min. | * Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min. | ||
* Table says 5 min develop. | * Table says 5 min develop. | ||
| Line 8: | Line 9: | ||
* I developed about 30 s more. | * I developed about 30 s more. | ||
* In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased. | * In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased. | ||
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Time to start again | Time to start again | ||
Revision as of 11:14, 9 March 2021
Continued from yesterday
- Had left the insolated wafer on the hot plate over night. This means 15 hours rest instead of 10 min.
- Table says 5 min develop.
- I used new PGMEA
- After 3 minutes I noticed white structures in the region around the main structures. I did not understand what this signified
- After 5 min I rinsed with isopropanol (IP)
- I struggled to get good view in the microscope. Therefore I miscalculated what I saw and thought I needed to develop more.
- I developed about 30 s more.
- In the microscope it was now clear that the structures where overdeveloped and all the smallest features where erased.
Time to start again
New try
- Use new wafer and go straight for plasma cleaning
- Skip heating and do spinning
