Difference between revisions of "20210310"

Revision as of 11:24, 11 March 2021

• Started with new SU8
• Took it out from the fridge at 09:00
• Transferred to a new syringe
• Let out inside alu foil to thermalize
• new wafer cleaned for dust with IP, plasma treated and then 160 C for 7-8 min
• changed spin program to 970 rpm to achieve 890 rpm on the readout.
• transferred su8 from syringe
• forgot to leave it some minutes on the wafer to thermalize before spinning
• spun for 60s at 890 rpm (readout)
• leave for 10 minutes on spin coater
• to keep the hot plate at 95C beyonf 99.9 min I programmed a third period: 40 + 80 min