Photolitho20240319 - MP
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Revision as of 17:40, 20 March 2024 by Mengpa@uio.no (talk | contribs) (Created page with "25 um using GM1070 Fixed the hotplate setting: will not start immediately after power on Used VWR (ramp6) for 3rd wafer, works well Used 2nd glass beaker for IPA washing after...")
25 um using GM1070 Fixed the hotplate setting: will not start immediately after power on Used VWR (ramp6) for 3rd wafer, works well Used 2nd glass beaker for IPA washing after development, wafer is clean and homogenous