20210310
From mn.fysikk.laglivlab
- Started with new SU8
- Took it out from the fridge at 09:00
- Transferred to a new syringe
- Let out inside alu foil to thermalize
- new wafer cleaned for dust with IP, plasma treated and then 160 C for 7-8 min
- changed spin program to 970 rpm to achieve 890 rpm on the readout.
- transferred su8 from syringe
- forgot to leave it some minutes on the wafer to thermalize before spinning
- spun for 60s at 890 rpm (readout)
- leave for 10 minutes on spin coater
- to keep the hot plate at 95C beyonf 99.9 min I programmed a third period: 40 + 80 min