Photolitho20240319 - MP
From mn.fysikk.laglivlab
Revision as of 17:41, 20 March 2024 by Mengpa@uio.no (talk | contribs)
25 um using GM1070
Bad:
During the day, the emergency light was on 5 times.
Good:
Fixed the hotplate setting: it will not start immediately after power on
Used VWR (ramp6) for 3rd wafer, works well It's much faster than the hotplate.
Used 2nd glass beaker for IPA washing after development, wafer is clean and homogenous.
