UV KUB

UV kub program

1. Check the power plug in
2. Turn on power (backside of the kub)
3. Press on button (frontside of the kub)
4. Touch screen, the screen will be on with several selection
5. Select masking (the mask holder will move out afterwards)
6. Load the wafer into the wafer holder: note that the flat edge of the wafer must be fixed into the flat edge of the holder
7. Load the mask into mask holder, the printed side is down (will contact the wafer)
8. Touch the screen, the mask and wafer holder move in
9. The screen will have have information: wafer is loaded, please wait until the screen change
10. Screen has information:

• Thickness: enter thickness of substrate (= wafer thickness + PR thickness, Si wafer = 525 +\- 25 µm), maximum substrate thickness is 2.6 mm
• Distant: enter distance (this is the distance between mask and wafe)

1. Soft contact: distant = 10 µm
2. Hard contact: distant = 0

11. Wait until the wafer is loaded in position

12. The screen: continue/cancel

• To cancel: press cancel
• To continue: Press continue

13. Screen: New cycle/ memory

• When you program your setting parameter for illumination, the program would be saved as a cycle.

UV kub has total 10 program that can be saved. You can use a program that has been saved before, if you want the similar illumination parameter.

• Press memory if you want to a saved program, select cyle

For example: Cycle 2: mode - continous, duration: 40s, power: 100 %

• Press new cycle if you want to have new illumination parameter

Choose mode: select continous Duration: Duration = E /P * 100/power

if duration is 40s, press 40s if duration is 90s, press 1m30s

Power: 100 % (full power). For example: with 100 µm GM1070 SU8 photoresist, required UV illuminated energy is 1000 J/cm2. If we use continuos mode and full power, duration t = 1000(J/cm2) /23.4 (mW/cm2) * 100/100 = 43 s

• Note that whenever you select parameters, press enter to confirm your selection

14. Press insolate, the wafer is illuminated. If you want to stop the illumination, press red button in front of the UV kub

15. Insulate finish, touch screen

16. Tray out: the wafer and mask holder move out. Take mask and wafer out.

17. Touch screen, the tray moves in

18. The screen: continue/cancel. Select cancel

19. Turn off on/off button in front of the UV kub (screeen change to balck)

20. Turn off power (backside of the UV kub)