Difference between revisions of "20210318 3Dcell labnotes"
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* Spun SU8 at 900 rpm -> 100 um thickness | * Spun SU8 at 900 rpm -> 100 um thickness | ||
* pre-bake 15 min at 65C, 2h at 95C | * pre-bake 15 min at 65C, 2h at 95C | ||
| − | * | + | * UV-KUB: 22s 25%, distance 700 |
| + | * Taking the wafer out from the UV-KUB it stuck to the mask that stuck to the glass. Loosening it it fell down (1-2 cm) and broke in 2. One of the pieces broke in 2 again on the hot plate. | ||
| + | * post bake 15 min at 65C, 40min at 95C | ||
Latest revision as of 13:54, 18 March 2021
- Washed new wafer with IP
- dried with N_2
- Plasma cleaner 30s
- Was to eager to start, so I forgot heating the wafer to 150C for 10 min
- Spun SU8 at 900 rpm -> 100 um thickness
- pre-bake 15 min at 65C, 2h at 95C
- UV-KUB: 22s 25%, distance 700
- Taking the wafer out from the UV-KUB it stuck to the mask that stuck to the glass. Loosening it it fell down (1-2 cm) and broke in 2. One of the pieces broke in 2 again on the hot plate.
- post bake 15 min at 65C, 40min at 95C
