Difference between revisions of "20210318 3Dcell labnotes"
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Revision as of 10:28, 18 March 2021
- Washed new wafer with IP
- dried with N_2
- Plasma cleaner 30s
- Was to eager to start, so I forgot heating the wafer to 150C for 10 min
- Spun SU8 at 900 rpm -> 100 um thickness
- pre-bake 15 min at 65C, 2h at 95C
