Difference between revisions of "Photolithography"

From mn.fysikk.laglivlab
Jump to: navigation, search
(first)
 
m (localise)
Line 4: Line 4:
 
# [[A Simplified Version]]  
 
# [[A Simplified Version]]  
 
# [[Mathias Busek's protocol 2020]]  
 
# [[Mathias Busek's protocol 2020]]  
[https://wiki.uio.no/mn/pgp/index.php/Lithography/SU8_datasheet 2. Datasheet]
+
[UV KUB|UV KUB]
  
 
[https://wiki.uio.no/mn/pgp/index.php/Lithography/SU8_references 3. References]
 
[https://wiki.uio.no/mn/pgp/index.php/Lithography/SU8_references 3. References]

Revision as of 15:48, 8 March 2021

SU8 process

1. Process

  1. A Simplified Version
  2. Mathias Busek's protocol 2020

[UV KUB|UV KUB]

3. References