Photolithography

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Photolithography explained

Photolithography

SU8 process (square features)

Full description of process

A Simplified Version

Mathias Busek's protocol 2020

UV KUB programming

Important notes 05.03.2021

  • UV doses in the tables are too large. Look at comments in Matias Busek's protocol
  • The programmable hotplate is not reliable
    • Two times in a row the same procedure for 25 um thick substrate with VWR and programmable hot plates gave good results for VWR hotplate but overdevelopment for programmable hotplate.
    • I have observed that the programmable hotplate seems to spend too long time at each step.

XT process (rounded channels)