Difference between revisions of "20220308 photolitho"
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Dagkd@uio.no (talk | contribs) (Created page with "Started 08:30 following procedure. * New box of 3" wafers, cleaned with IP and N2, * plasma cleaning 1 min 100%") |
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Revision as of 10:04, 8 March 2022
Started 08:30 following procedure.
- New box of 3" wafers, cleaned with IP and N2,
- plasma cleaning 1 min 100%
