20210318 3Dcell labnotes

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Washed new wafer with IP
dried with N_2
Plasma cleaner 30s
Was to eager to start, so I forgot heating the wafer to 150C for 10 min
Spun SU8 at 900 rpm -> 100 um thickness
pre-bake 15 min at 65C, 2h at 95C

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