Photolithography
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Revision as of 15:48, 3 May 2021 by Dagkd@uio.no (talk | contribs)
Contents
SU8 process (square features)
Full description of process
A Simplified Version
Mathias Busek's protocol 2020
UV KUB programming
Important notes
- UV doses in the tables are too large. Look at comments in Matias Busek's protocol
- The programmable hotplate is not reliable
- Two times in a row the same procedure for 25 um thick substrate with VWR and programmable hot plates gave good results for VWR hotplate but overdevelopment for programmable hotplate.
- I have observed that the programmable hotplate seems to spend too long time at each step.
