Difference between revisions of "Photolithography"
From mn.fysikk.laglivlab
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| − | == SU8 process == | + | == SU8 process (square features) == |
=== [[Full process|Full description of process]] === | === [[Full process|Full description of process]] === | ||
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=== [[Mathias' process|Mathias Busek's protocol 2020]] === | === [[Mathias' process|Mathias Busek's protocol 2020]] === | ||
=== [[UV KUB|UV KUB programming]] === | === [[UV KUB|UV KUB programming]] === | ||
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| + | == XT process (rounded channels) == | ||
