Photolithography
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Revision as of 15:59, 8 March 2021 by
Dagkd@uio.no
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Contents
1
SU8 process
1.1
Full description of process
1.2
A Simplified Version
1.3
Mathias Busek's protocol 2020
1.4
UV KUB programming
SU8 process
Full description of process
A Simplified Version
Mathias Busek's protocol 2020
UV KUB programming
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